High-sensitivity Fabry–Perot interferometric pressure sensor based on a nanothick silver diaphragm

Research Paper: Researchers present a fiber-optic extrinsic Fabry–Perot interferometer pressure sensor based on a nanothick silver diaphragm. The sensing diaphragm, with a thickness measured in a few hundreds of nanometers, is fabricated by the electroless plating method, which provides a simple fabrication process involving a high-quality diaphragm at a low cost. 

The sensor exhibits a relatively linear response within the pressure variation range of 0–50 kPa, with a high pressure sensitivity of 70.5 nm/kPa. This sensor is expected to have potential applications in the field of highly sensitive pressure sensors.

Citation

Feng Xu, Dongxu Ren, Xiaolong Shi, Can Li, Weiwei Lu, Lu Lu, Liang Lu, and Benli Yu, "High-sensitivity Fabry–Perot interferometric pressure sensor based on a nanothick silver diaphragm," Opt. Lett. 37, 133-135 (2012)

http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-37-2-133